VPi-5 iVacSens™ TRANSDUCER SPECIFICATIONS

Specifications

Measuring range

1×10^-6 to 1,333 mbar (7.5×10^-7 to 1,000 Torr)

Measuring principle 1×10^-6 to 1.5 mbar

MEMS Pirani thermal conductivity (Heat-loss)

Measuring principle 2 to 1,333 mbar

MEMS piezo resistive diaphragm (non gas dependant)

Measuring principle 1.5 to 2 mbar

Blended MEMS Pirani / piezo reading

Accuracy 1×10^-5 to 9.99×10^-5

25% of reading

Accuracy 1×10^-4 to 9.99 mbar

5 % of reading

Accuracy 10.0 to 99.9 mbar

1% of reading

Accuracy 100 to 800 mbar

0.5% of reading

Accuracy 800 to 1,099 mbar

0.25 % of reading

Accuracy 1,100 to 1,333 mbar

0.5% of reading

Maximum measuring resolution

1.0E-7 mbar

Vacuum temperature sensor range

-20 to + 85°C

Vacuum temperature sensor accuracy

+/- 1.5 °C

Transducer temperature sensor range

-20 to + 85°C

Transducer temperature sensor accuracy

+/- 1.5 °C

Temperature compensation

+10 to +50 °C

Analog output signal

0.2 - 1.55 VDC

Analog output signal resolution

12 bit 

Analog output update rate

124 Hz

Set point range (absolute)

5×10^-6 to 1,333 mbar (3.75×10^-6 to 1000 Torr)

Setpoint output high level

>2.9 VDC

Setpoint output low level

<0.4 VDC

Setpoint output source and sink current     

1 mA maximum

Environment conditions

Operating ambient temperature

-40 to +50 °C (-40 to +122 °F)

Media temperature

-20 to +50 °C (-58 to 122 °F)

Storage ambient temperature

-40 to +125 °C  (-40 to +257 °F)

Maximum media pressure

10 bar

Mounting position

Arbitrary

Protection rating, EN 60529/A2:2013

IP40

Humidity, IEC 68-2-38

98%, non-condensing

Power supply

Supply voltage 

3.3 VDC or 4-18 VDC 

Power consumption 

25 mW (Max) 3.3 VDC supply

95 mW (Max) 4-18 VDC supply

Approvals

RoHS compliance

Directive EU 2015/863