iVacSens™ VACUUM TRANSDUCER MODULE

The iVacSens™ Series vacuum transducer module is the world’s smallest wide-range multi-function combination vacuum gauge designed for integration in OEM equipment. The iVacSens™ is based on the record-breaking and well-proven SmartPirani™ MEMS heat-loss sensor that offers best-in-class performance, wider measurement range and higher accuracy than traditional wire Pirani, legacy MEMS Pirani, and convection gauges.

The ultra-compact design and low power consumption makes it appealing for battery operated equipment like portable mass spectrometers or leak-detectors.

VPi-4 TRANSDUCER MODULE

• Measurement range 1×10^-6 to 13.33 mbar (7.5×10^-7 to 10 Torr)
• Best-in-class MEMS Pirani sensor with 1E-6 mbar measurement capability
• Analog and digital outputs
  

VPi-5 TRANSDUCER MODULE

• Measurement range 1×10^-6 to 1,333 mbar (7.5×10^-7 to 1,000 Torr)
• Ultra-wide range and high performance best-in-class MEMS Pirani sensor
• Precision gas independent diaphragm sensor from 2 to 1,333 mbar.
  

VPi-7 TRANSDUCER MODULE

• Measurement range 1×10^-6 to 1,333 mbar (7.5×10^-7 to 1,000 Torr)
• Ultra-wide range and high performance best-in-class MEMS Pirani sensor
• Precision gas independent diaphragm sensor from 2 to 1,333 mbar.
• Atmospheric switching function and gauge pressure measurement output