Semiconductor manufacturing is an extremely complex and highly precise process that demands meticulous control over various parameters. Among these, vacuum gas pressure measurement and control plays a crucial role in ensuring the quality, reliability, and efficiency of semiconductor fabrication processes.
There are many processes in the art of fabricating semiconductors where vacuum technology and vacuum measurement plays a pivotal role including:
- Load-lock systems
- Physical Vapor Deposition (PVD)
- Chemical Vapor Deposition (CVD)
- E-beam lithography
- EUV lithography
- Epitaxial Film Growth (EPI)
- Chemical-Mechanical wafer polishing
- X-ray inspection equipment
- Wafer polishing
From wafer fabrication to cleanroom environments, accurate vacuum control is essential for optimizing semiconductor manufacturing processes.
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