Scanning Electron Microscopes 

An electron microscope uses an electron beam to generate a three-dimensional nano-scale image of the specimen's surface, and the advanced technology provides a much higher resolution than a traditional optical microscope. The electron scanning process takes place under vacuum pressure, and measurement of the pressure is critically important to operate an electron microscope. The typical safe pressure for starting the scanning process is less than 1E-4 mbar (7.5E-5 Torr), and therefore, cold or hot cathode ionization vacuum gauges have traditionally been used.

Novel Vacuum Measurement solutions for SEM

The extended measurement range of the VPM-5 SmartPirani™ transducer pushed the boundaries of what was possible in heat-loss vacuum measurement technology. The zero-stability and measurement repeatability of the VPM-5 SmartPirani™ enable the detection of pressure below 1E-4 mbar (7.5E-5 Torr), enabling use in electron microscopes as the primary vacuum detection device and pressure safety interlock control.

MEMS Pirani technology offers several advantages over cold cathode and hot cathode ionization vacuum gauges, including:

• Absence of ion generation
• No magnetic field
• Extremely compact size
• Minimal power consumption
• No heat generation
• Lower cost
• Extended service intervals

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