February 27th, 2020
In many industries, like the semiconductor, analytical and PVD coating industry, devices must be cycled and transferred from ambient air pressure to a vacuum chamber for processing or analysis under vacuum. These applications typically use an auxiliary vacuum chamber called a load-lock, where the vacuum gas pressure must be accurately controlled during the pump-down and ventilation cycle.
The VPM-7 SmartPirani™ ATM is a next-generation vacuum transducer for load-lock control that combines different types of sensor technologies to provide an all-in-one solution for advanced and reliable load-lock pressure control.
“A year ago, we launched the record-breaking and patent pending SmartPirani™ transducer that has been well-received by the vacuum industry. However, we learned that some of our customers needed an atmospheric switching function in combination with the Pirani measurement capabilities down to 1.0E-6 mbar (7.5E-7 Torr), and we solved the challenge by adding an atmospheric switch function and pressure measurement capability relative to ambient atmospheric pressure.” said Ole Wenzel, CEO of Sens4 A/S.
“The SmartPirani™ ATM transducer is a true multi-sensor transducer with a market-leading wide range heat-loss MEMS sensor for measurement from 1.0E-6 to 2 mbar and an absolute diaphragm sensor that offers gas type independent measurement from 2 to 1,333 mbar.” said Dr. Caspar Christiansen CTO of Sens4 A/S. Caspar continues: “The transducer includes a precision barometric sensor used for reference to ambient pressure which makes precision control of gas back-fill and ventilation of load-lock vacuum systems possible.”
The SmartPirani™ ATM offers a flexible interface and several control options including high-resolution analog output with emulation curves for other vendors vacuum gauges, 3 independent solid-state relays and digital RS-232 or RS-485 interface.
Furthermore, the SmartPirani™ ATM comes with a new, innovative approach for visually determining the measured pressure by a multi-color RGB LED that smoothly changes color throughout the vacuum pressure range. This new visual function is a low-cost alternative to integrated displays and provides a rough indication of the measured pressure. It also provides a clear visual warning if the vacuum system is pressurized above ambient pressure.
The modern SmartPirani™ ATM offers pin and output compatibility with legacy load-lock transducers and can easily be used for performance upgrades of existing vacuum system installations without making changes to the system software and wiring.
Do you have questions or need help configuring the right products?
Our passion | Your value™
Copyright © 2020 - Sens4 A/S