Sens4 offers pressure, vacuum and temperature measurement solutions for the semiconductor industry. Precision control of process parameters is critically important in many semiconductor applications and accurate and reliable measurement data is essential for consistent process control.
The Sens4 team have many years of experience with vacuum and pressure measurement in the semiconductor industry. We acknowledge the process complexity and chemistry used in the semiconductor industry. We are focused not only on supply of a product, but on supply of a reliable measurement solution that ensure up-time and is cost attractive.
Pirani vacuum gauges are used in many semiconductor applications. The SmartPirani™ transducer offers improved measurement performance compared to traditional convection Pirani, wire Pirani and MEMS Pirani transducers. The extended measurement range enables use in a pressure region where cold and hot cathode vacuum gauges are commonly used.
The SmartPirani™ is available with a user-cleanable integrated particulate baffle system specially designed for PVD applications. The innovative baffle feature can increase time between service intervals and increase equipment up-time.
SmartPirani™ is available with pre-configured settings according to customer specifications that reduce installation time for OEM semiconductor equipment manufacturers.
The corrosion resistant pressure transducer and transmitter product portfolio from Sens4 offers gas independent vacuum and pressure measurement. Capacitance manometers with Ceramic or Inconel diaphragm are often used in the semiconductor industry for vacuum and high-pressure measurement. The diaphragm based transducers from Sens4 can in some applications be a cost-attractive alternative to unheated Capacitance manometers.
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