Semiconductor applications



Sens4 offers pressure, vacuum and temperature measurement solutions for the semiconductor industry. Precision control of process parameters is critically important in many semiconductor applications and accurate and reliable measurement data is essential for consistent process control.

  • Load-lock vacuum pressure monitor and control of venting process.
  • Gas delivery and distribution systems
  • Leak detection equipment
  • Clean room pressure control
  • Physical vapour deposition equipment
  • Wafer polishing equipment
  • Crystal growth equipment
  • Hydrostatic level measurement
  • DI water system supply pressure and temperature control
  • E-Beam Lithography equipment
  • EUV Lithography equipment
  • X-ray inspection equipment

The Sens4 team have many years of experience with vacuum and pressure measurement in the semiconductor industry. We acknowledge the process complexity and chemistry used in the semiconductor industry. We are focused not only on supply of a product, but on supply of a reliable measurement solution that ensure up-time and is cost attractive.

Do not hesitate to contact us for application and product recommendations and assistance.

Recommended vacuum and pressure measurement products for semiconductor applications:

SMARTPIRANI™ transducer, an ultra-wide range Pirani transducer

Pirani vacuum gauges are used in many semiconductor applications. The SmartPirani™ transducer offers improved measurement performance compared to traditional convection Pirani, wire Pirani and MEMS Pirani transducers. The extended measurement range enables use in a pressure region where cold and hot cathode vacuum gauges are commonly used.   

The SmartPirani™ is available with a user-cleanable integrated particulate baffle system specially designed for PVD applications. The innovative baffle feature can increase time between service intervals and increase equipment up-time.

SmartPirani™ is available with pre-configured settings according to customer specifications that reduce installation time for OEM semiconductor equipment manufacturers. 

  • Measurement range 1.0x10-6 to 1333 mbar (7.5x10-7 to 1000 Torr)
  • StableZero™ technology offers unmatched stability of zero-point and extended measurement range
  • Reliable and high performance UL listed, CSA recognized, and EN/IEC 60950-1compliant solid-state relays for setpoint controlling 
  • Compact and robust stainless steel design with optional baffle protection
  • Plug-and-play compatible with other vendors of MEMS Pirani, wire Pirani and cold cathode products

Ceramic and stainless steel diaphragm vacuum & pressure transducers

The corrosion resistant pressure transducer and transmitter product portfolio from Sens4 offers gas independent vacuum and pressure measurement. Capacitance manometers with Ceramic or Inconel diaphragm are often used in the semiconductor industry for vacuum and high-pressure measurement. The diaphragm based transducers from Sens4 can in some applications be a cost-attractive alternative to unheated Capacitance manometers.

  • Vacuum and high-pressure measurement up to 50 bar
  • Corrosion resistant stainless steel and ceramic diaphragm sensor technology
  • Absolute and gauge pressure measurement
  • Reliable solid-state relays for setpoints controlling
  • Compact and robust stainless steel design with IP67 enclosure.
  • Cost-attractive alternative to traditional Inconel and ceramic capacitance manometers and transducers used in Semi-conductor industry.