Historically, oil-lubricated vacuum pumps were the predominant type used in many vacuum applications and industries. These pumps, such as rotary vane pumps, rely on oil for the lubrication of moving parts. However, the design of rotary vane pumps has a significant drawback: the lubrication oil comes into contact with the gas being pumped, leading to oil vapor backstreaming. In applications like semiconductor manufacturing and analytical instrumentation, hydrocarbons from oil vapor are unacceptable process contaminants.
Dry vacuum technology has been widely adopted in various vacuum applications to create a hydrocarbon-free vacuum environment. This is achieved through the use of dry vacuum pumps, such as scroll, screw, roots, and diaphragm pumps.
To establish a contaminant-free vacuum system, it is also critically important to ensure that all vacuum components—e.g., valves, fittings, and gauges—are manufactured and cleaned to meet stringent standards.
Vacuum gauges, in particular, need to be tested and calibrated during manufacturing. Therefore, it is essential to ensure that gauges are produced in a dry vacuum environment. At Sens4, all vacuum processes for manufacturing of vacuum gauges, including leak detection and calibration, are performed in dry vacuum systems. This ensures that vacuum measurement products meet and exceed cleanliness expectations in advanced industries like semiconductor manufacturing.
Dry vacuum technology has become a cornerstone of modern industries, where cleanliness, environmental compliance, and process efficiency are paramount.
