Leading Vacuum Measurement Technology
The VPM-5 SmartPirani™ transducer delivers exceptional performance, setting new benchmarks in vacuum measurement by expanding the usable measurement range of thermal conductivity vacuum gauges by 1 to 3 decades.
The well-known gas dependency in the rough vacuum range of thermal conductivity gauges has been eliminated by integrating a MEMS diaphragm sensor that provides precision performance comparable to more expensive capacitance manometers. The measurement is independent of gas type and concentration, enhancing confidence in the measurement and ensuring more accurate control of vacuum system venting processes, which can help prevent over-pressurization of the vacuum system.
Enabling Use in Demanding Applications
For applications where sensors may be exposed to corrosive or aggressive gases, the SmartPirani™ is available with a conformal protective coating that acts as an effective barrier.
The SmartPirani™ transducer series is now available with an optional ceramic or Parylene protective barrier against corrosion or oxidation of sensor materials. Ceramic is highly corrosion-resistant and is a proven material for vacuum sensor diaphragms in capacitance diaphragm gauges. Parylene is a unique polymer with highly corrosion-resistant and hydrophobic properties. The Parylene barrier is designed for medical applications, including lyophilization and sterilization.
In some vacuum processes, particulates can damage vacuum gauges. For these applications, the SmartPirani™ transducers are available with a protective baffle that acts as a barrier against macroscopic particles. In combination with protective coating options, the new SmartPirani™ transducers are designed for tough vacuum environments.
Measure and Control Advanced Vacuum Processes
The VPM-5 SmartPirani™ is engineered for best-in-class measurement and control of vacuum gas pressure. Several output options provide more than just a pressure measurement signal.
Analog Output
The analog output voltage provides a signal for external readout or controls. The VPM-5 offers as standard a voltage output signal of 1VDC/decade mbar, Torr, or Pascal.
Furthermore, it can also be user configured or ordered preconfigured with a large selection of other analog output options that enables drop-in replacement of gauges from other vendors.
Connect Digital
The RS-232 and RS-485 serial interfaces can be used to transfer pressure and temperature measurement data to external equipment.
The digital interface enables diagnostics, predictive maintenance, service, calibration, setpoint configuration, analog output scaling, and the acquisition of real-time vacuum pressure measurements for on-screen visualization.
Reliable Setpoint Relay Control
The three independent solid-state switch relays can be used for external control of pumps, valves, safety interlock circuits, and other external equipment.
Compared to electro-mechanical relays, solid-state relays offer superior reliability and faster switching times while providing arc-free contacts and generating no EMI (electromagnetic interference) when switching.
The SmartPirani™ relays are designed to last and are UL-listed, CSA-recognized, and EN/IEC 60950-1 certified for maximum confidence when used to control critical vacuum processes and high-cycle applications.
Other Vendor Compatibility
The VPM-5 SmartPirani™ transducer is available with pin compatibility, analog voltage pressure signal emulation, and digital protocol emulation with vacuum transducers and transmitters from other vendors.
These emulation features enable quick, seamless upgrades of traditional wire Pirani transducers, convection gauges, and legacy micro-Pirani transducers, allowing a transition to next-generation vacuum transducers without changing cabling and system equipment software.
The VPM-5 SmartPirani™ will provide both cost reduction and enhanced measurement performance in many applications when replacing legacy vacuum gauges and transducers.
The other vendor emulation also provides compatibility with other vendors' controllers and display units.
Connect Digital Through Supply Voltage Line
Traditionally, other vendors' transducers equipped with FCC68/RJ45/8P8C and Hirschmann connectors do not offer digital communication. The novel S4-Connect interface enables access to the digital core of the VPM-5 transducer through digital communication over the power supply line.
The S4-Connect USB communicator enables easy configuration of transducer settings, diagnostics, and adjustment of calibration.
Customized Settings
The VPM-5 transducer can be delivered with a custom configuration to match specific application requirements and work for a specific equipment installation out of the box. Examples of pre-configured options include measurement range, vacuum pressure unit, setpoint configuration, and output signal scaling.
Customized products will be assigned a unique part number for easy and straightforward future reordering.
PVD Coating
The VPM-5 with serviceable baffle protection enable use and longevity in Physical Vapor Deposition (PVD) coating applications.
Furnace
Measure and control vacuum during vacuum heat treatment. Optional baffle and coating protection available for industrial applications.
Space Simulation
Measure vacuum gas pressure when simulating the harsh environment of space.
Hydrogen Supply
Measurement and surveillance of insulation vacuum in Hydrogen storage tanks and supply lines.
Semiconductor
CVD, PVD, and foreline vacuum measurement in Semiconductor applications. Ceramic corrosion resistant sensors available.
Mass Spectrometers
Take advantage of the low pressure measurement capability offered by the VPM-5 in mass spectrometer instrumentation.
Applications & Markets
The VPM-5 SmartPirani™ is designed for reliable measurement and control of advanced vacuum processes and is suitable for a wide range of applications in industry and science. A wide selection of VPM-5 configurations is available to meet different requirements across various applications.
