Rethink Vacuum Gauging
The VPM-15 TriCAP™ is an innovative multi-sensor vacuum gauge and is the ideal choice for upgrading the performance of traditional Pirani gauge applications or as a cost-optimized all-in-one solution for applications that use separate capacitance manometers and Pirani gauges.
Automatically Zero Adjustment of CDG
The integrated heat-loss MEMS Pirani sensor extends the measuring range down to 1E-6 mbar and provides an innovative automatic zero adjustment for the capacitance manometer, eliminating the common need for manual zero adjustment in traditional capacitance diaphragm gauges. No manual push-button zero adjustment required—simply pump down to the auto-zero point, and the CDG is automatically adjusted and ready to use.
Enabling Use in Demanding Applications
For applications where sensors may encounter corrosive or aggressive gases, the TriCAP™ is available with a conformal protective coating that serves as an effective barrier.
The TriCAP™ transducer series offers an optional ceramic or Parylene protective layer to guard against sensor material corrosion or oxidation. Ceramic is highly resistant to corrosion and is a trusted material for vacuum sensor diaphragms in capacitance diaphragm gauges. Parylene, a unique polymer with exceptional corrosion-resistant and hydrophobic properties, is designed for medical applications, including lyophilization and sterilization.
In some vacuum processes, particulates can pose a risk to vacuum gauges. For these applications, TriCAP™ transducers are available with a protective baffle that shields against macroscopic particles. Combined with protective coating options, the TriCAP™ transducers are built for challenging vacuum environments.
Analog Output
A wide selection of analog output scaling options to emulate other vendors’ vacuum gauges and transducers is available. An optional secondary analog output enables external monitoring of both the full-range vacuum pressure and the pressure signal relative to atmospheric pressure
The analog output voltage provides a signal for external readout or controls. The VPM-15 offers as standard a voltage output signal of 1VDC/decade mbar, Torr, or Pascal.
Connect Digital
The RS-232 and RS-485 serial interfaces can be used to transfer pressure and temperature measurement data to external equipment.
The digital interface enables diagnostics, predictive maintenance, service, calibration, setpoint configuration, analog output scaling, and the acquisition of real-time vacuum pressure measurements for on-screen visualization.
Reliable Setpoint Relay Control
The three independent solid-state switch relays can be used to control external equipment, such as pumps, valves, and safety interlock circuits.
Unlike electro-mechanical relays, solid-state relays provide greater reliability and faster switching speeds, with arc-free contacts and no EMI (electromagnetic interference) during switching.
TriCAP™ relays are engineered for durability and are UL-listed, CSA-recognized, and EN/IEC 60950-1 certified, ensuring high confidence in controlling critical vacuum processes and high-cycle applications.
Other Vendor Compatibility
The VPM-15 TriCAP™ transducer is available with pin compatibility, analog voltage pressure signal emulation, and digital protocol emulation with vacuum transducers and transmitters from other vendors.
These emulation features enable quick, seamless performance upgrades of legacy micro-Pirani transducers, allowing a transition to next-generation vacuum transducers without changing cabling and system equipment software.
The VPM-15 TriCAP™ will provide enhanced measurement performance in many applications when replacing legacy vacuum gauges and transducers.
The other vendor emulation also provides compatibility with other vendors' controllers and display units.
Measure and Control Advanced Vacuum Processes
The VPM-15 TriCAP™ is engineered for best-in-class measurement and control of vacuum gas pressure. Several output options provide more than just a pressure measurement signal.
Applications & Markets
The VPM-5 SmartPirani™ is designed for reliable measurement and control of advanced vacuum processes and is suitable for a wide range of applications in industry and science. A wide selection of VPM-5 configurations is available to meet different requirements across various applications.
Hard Coating
The VPM-5 with serviceable baffle protection enable use and longevity in Physical Vapor Deposition (PVD) coating applications.
Furnace
Measure and control vacuum during vacuum heat treatment. Optional baffle and coating protection available for industrial applications.
Space Simulation
Gas composition can change during space simulation process due to outgassing from test objects. VPM-15 eliminates Pirani gas dependency.
Solar Thin Film
Measurement and surveillance of insulation vacuum in Hydrogen storage tanks and supply lines.
Semiconductor
CVD, PVD, and foreline vacuum measurement in Semiconductor applications. Ceramic corrosion resistant sensors available.
Mass Spectrometers
Take advantage of the low pressure measurement capability offered by the VPM-5 in mass spectrometer instrumentation.
