VPM-5 SmartPirani


1×10-6 to 1333 mbar / 7.5×10-7 to 1000 Torr / 1×10-4 to 1.333×105  Pa



  • Measurement range of 1×10-6 to 1333 mbar (7.5×10-7 to 1000 Torr)
  • Ultra-wide range high performance MEMS Pirani sensor
  • Unmatched price-performance ratio
  • Precision gas-independent measurement from 2 to 1333 mbar
  • Mountable in any orientation without impact on performance.
  • Programmable voltage output signal with other vendor emulation
  • Digital RS-232 or RS-485 interface
  • Three solid-state set points for vacuum process controlling
  • Optional Ceramic or Parylene sensor protection for corrosive applications
  • Drop-in replacement for MKS 925 MicroPirani™ and 910
  • Robust, compact stainless steel flange and enclosure design

Designed, engineered and made in Denmark


Download pdf datasheet

The VPM-5 SmartPirani™ vacuum transducer based on cutting edge technology that offers best-in-class performance and has established new performance standards by extending the usable vacuum measuring range for thermal conductivity vacuum gauges by 1-3 decades.

The SmartPirani™ vacuum measurement transducer starts with cutting edge MEMS (Microelectromechanical Systems) sensor technology, combined with a novel precision digital signal processing architecture and advanced innovative measurement algorithm only available from Sens4. Combined with precision automated manufacturing and calibration processes, this unique product provides uncompromised measurement performance.

SmartPirani measurement range in mbar

The well-known gas dependency in the rough vacuum range of thermal conductivity gauges has been eliminated by integrating a MEMS diaphragm sensor that offers precision performance comparable to more expensive capacitance manometers. This feature ensures more accurate control of vacuum system venting processes and can prevent over-pressurization of the vacuum system.

Unmatched range and accuracy

Compared to legacy wire-pirani and MEMS Pirani transducers from other vendors, the basic accuracy and dynamic range of the SmartPirani™ is superior. In certain applications, the ultra-wide measurement range eliminates the need for additional expensive high vacuum ionization gauges.

SmartPirani range and accuracy comparison

Programmable transducer settings and parameters

Transducer settings and parameters are user-programmable from a PC or smartphone via the innovative S4-Connect™ digital communication interface. Transducers with an RS-232 or RS-485 serial interface can either be configured via the serial interface or the S4-Connect™ interface. The digital interface enables diagnostics, predictive maintenance, service, calibration, setpoint configuration, analog output scaling and acquisition of real-time vacuum pressure measurements for on-screen visualization. The S4-Connect™ USB programmer in combination with the free, intuitive configuration software is a plug-and-play solution for transducer programming, real-time measurements and diagnostics.

Enabling use in demanding applications

For applications where the sensors can be exposed to corrosive or aggressive gases, the SmartPirani™ is available with conformal protective coating that acts as an efficient barrier.

Depending on the application the SmartPirani™ transducer series is now available with either an optional ceramic or Parylene protective barrier against corrosion or oxidation of sensor materials.

Ceramic is highly corrosion resistant and is a well-proven material for vacuum sensor diaphragms in capacitance diaphragm gauges.

Parylene is a unique polymer with highly corrosion resistant and hydrophobic properties. The Parylene barrier is designed for medical applications including, but not limited to lyophilization and sterilization.

In some vacuum processes, particulates can damage vacuum gauges and for these applications the SmartPirani™ transducers are offered with a protective baffle that acts as a barrier for macroscopic particles.

In combination with the protective coating options the new SmartPirani™ transducers are set for tough vacuum environments.

SmartPirani with protective baffle

Controlling vacuum pressure with reliable and robust setpoint relay control

The SmartPirani™ vacuum transducer is available with three independent solid-state switch relays can be used for external control of pumps, valves, safety interlock circuits and other external equipment. The basic control uses on/off regulation with a programmable setpoint and hysteresis value. Each solid-state relay offers both normally closed and normally open contacts.

Compared to electromechanical relays, the solid-state relays offer superior reliability and faster switching time while providing arc-free contacts and generating no EMI (electromagnetic interference) when switching contacts. 

The SmartPirani™ relays are designed to last and are UL listed, CSA recognized, and EN/IEC 60950-1 certified for maximum confidence when used to control critical vacuum processes and high-cycle applications.

For applications where atmospheric switching functionality is required, like load-lock vacuum systems, the VPM-7 SmartPirani™ ATM offers the same performance, features and functions as the VPM-5, but with an additional precision atmospheric switch capability.

Analog voltage output for external readout

Although the SmartPirani™ vacuum transducer holds advanced functionality and smart technology the transducer can be operated as a standalone analog device with supply of voltage and return of measurement signal.  The analog voltage output can be configured via the S4-Connect™ or RS-232/RS-485 interface to any arbitrary scaling in the range 0-10 VDC. The analog output scaling feature enables amplified signal in a limited pressure range.

Furthermore, a wide selection of analog output scaling options to emulate vacuum gauges and transducers from other vendors is available.

Customized settings

The SmartPirani™ vacuum transducer can be delivered with a custom configuration to match specific application requirements. Examples of pre-configured options include measurement range, vacuum pressure unit, setpoint configuration and output signal scaling. Customized products will be assigned a unique part number for easy and simple future re-ordering.




  • Mass spectrometers
  • Scanning electron microscopes
  • Furnace heat treatment
  • PVD coating of glass, optics, tools, packaging, decorative
  • Refrigeration manufacturing and service
  • Semiconductor processing equipment
  • Vacuum pump service

Rethink vacuum gauging



A MEMS Pirani vacuum sensor, gauge or transducer is a device for measuring vacuum gas pressure by measurement of the pressure dependent heat-loss from a heated resistive element deposited on a suspended micro-machined diaphragm. The MEMS Pirani vacuum transducer can measure........

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MicroPirani is a trademark of MKS Instruments, Inc