VPM-5 SMARTPIRANI™ TRANSDUCER SPECIFICATIONS

Specifications

Measuring range

1×10^-6 to 1333 mbar (7.5×10^-7 to 1000 Torr)

Measuring principle 1x10^-6 to 1.5 mbar

MEMS Pirani thermal conductivity (Heat-loss)

Measuring principle 2 to 1333 mbar

MEMS piezo resistive diaphragm

Measuring principle 1.5 to 2 mbar

Blended MEMS Pirani / piezo reading

Accuracy 1×10^-5 to 9.99×10^-5

25% of reading

Accuracy 1×10^-4 to 7.99 mbar

5 % of reading

Accuracy 8.00 to 99.9 mbar

1% of reading

Accuracy 100 to 800 mbar

0.5% of reading

Accuracy 800 to 1099 mbar

0.25 % of reading

Accuracy 1100 to 1333 mbar

0.5% of reading

Maximum measuring resolution

1.0E-7 mbar

Output signal 1

1 VDC / decade (0.5VDC at 1.0E-6 mbar)

Output signal 2 (MKS 901P, 910, 925 Emulation)

1 VDC / decade (1.0VDC at 1.0E-5 Torr)

Output signal 3 (MKS GP 275 Convectron^®)

0.375 to 5.659 VDC

Output signal 4 (MKS 523)

0.5 VDC / decade (MKS 523)

Output signal 5 (Inficon PSG500, PSG502, PSG510, PSG512 )

1.9 - 10 VDC (Inficon PSG55x, Leybold TTR91)

Output signal 6 (Leybold TTR91, TTR96, TTR101)

1.5 - 8.5 VDC (Pfeiffer TPR260/27x/28x)

Output signal 7 (MKS GP 275 Convectron^®)

1.9 - 9.1 VDC

Output signal 8 (MKS GP 390 MicroIon)

0.5 VDC / decade

Output Signal 9 (MKS 971, 972, 974B)

0.5 VDC / decade (MKS 971B, 972B, 974B)

Output signal 10 (Inficon Gemini output 1)

1 VDC / decade

Output signal 11 (Inficon Gemini output 2)

1.33  VDC / decade

Output signal 12 (Inficon Gemini output 3)

0.6 VDC / decade

Output signal resolution

16 bit

Solid state relay contact rating (optional)

250 mA, 50 VDC / VAC peak

Environment conditions

Operating ambient temperature

-40 to +50 °C (-40 to +122 °F)

Media temperature

-20 to +50 °C (-58 to 122 °F)

Storage ambient temperature

-40 to +125 °C  (-40 to +257 °F)

Maximum media pressure

10 bar

Mounting position

Arbitrary

Protection rating, EN 60529/A2:2013

IP40

Humidity, IEC 68-2-38

98%, non-condensing

Power supply

Supply voltage 

12-30 VDC

Power consumption 

350 mW (Max)

Reverse polarity protection

Yes

Overvoltage protection

Yes

Internal fuse

100 mA (Thermal recoverable)

Materials

Vacuum process flange

316 stainless steel

Enclosure

316 stainless steel / Aluminum

Vacuum exposed materials (media wetted)

316 Stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO₂, Si₃N₄, gold, Viton®, low out-gassing epoxy resin, solder, RO4305

Vacuum exposed materials (media wetted) Ceramic protected

316 Stainless steel, Viton^®, Aluminum oxide ceramic (AI₂O₃)

Vacuum exposed materials (media wetted) Parylene protected

316 Stainless steel, Viton^®, Parylene

Process leak tightness 

<1·10^-9 mbar·l/s

Approvals

CE

EMC directive 2014/30/EU

RoHS compliance

Directive EU 2015/863