Gauge Pressure Measurement Explained

Gauge pressure is the pressure measured relative to ambient atmospheric pressure. It can be measured using a diaphragm-based sensor, where:

• One side of the diaphragm is exposed to the pressure medium to be measured.
• The other side is exposed to ambient atmospheric pressure.

Considerations in Gauge Pressure Measurement

When measuring gauge pressure, it is important to note that the measured value will vary with changes in barometric pressure caused by weather fluctuations. This variation occurs unless the measurement point is also exposed to ambient atmospheric pressure.

Applications of Gauge Pressure Sensors

In vacuum applications, gauge pressure measurement and control are used to:

• Accurately ventilate vacuum chambers to atmospheric pressure.
• Prevent particulate contamination when the chamber is opened to the atmosphere.
  This technique is especially important in semiconductor load lock applications.