MKS 901P LOADLOCK TRANSDUCER DROP-IN REPLACEMENT

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The VPM-7 vacuum transducer is a drop-in replacement alternative to the MKS 901P loadlock transducer commonly used in the semiconductor industry.
The VPM-7 SmartPirani ATM transducer is pin and output compatible with the 901P loadlock transducer. The suggested MKS 901P equivalent drop-in replacement transducer is intended for easy swap and installation without modification of cabling, analog voltage pressure scaling, setpoint control and digital communication.

Additionally, the VPM-7 transducer offers performance upgraded to existing 901P load-lock transducer installations including extended measuring range, wider range of gas independent measurement and reliable solid state relays for controls purpose.

Cross-reference disclaimer

This 901P cross-reference tool is a guide to assist users who have technical insight and knowledge in vacuum gauging technology. The suggested cross-referenced product is based on our best technical assessment of the published product information from the other manufacturer at the time that we collected such information.

The suggested cross-referenced products are not identical and technical differences may exist. The user is solely responsible for determining the suitability and compatibility of the suggested Sens4 product in the user application and environment. We recommend a detailed review of our data sheet and specifications prior to installation and use.

Sens4 is not liable for any claims arising from issues related to interchange of products, improper use, incorrect installation or use with gases or liquid not compatible with the media wetted materials described in the product specifications table.