Specifications | |
Measuring range | 1×10-6 to 1333 mbar (7.5×10-7 to 1000 Torr) |
Measuring principle 1×10-6 to 1.5 mbar | MEMS Pirani thermal conductivity (Heat-loss) |
Measuring principle 2 to 1,333 mbar | MEMS piezo resistive diaphragm (non gas dependant) |
Measuring principle 1.5 to 2 mbar | Blended MEMS Pirani / piezo reading |
Accuracy 1×10-5 to 9.99×10-5 | 25% of reading |
Accuracy 1×10-4 to 9.99 mbar | 5 % of reading |
Accuracy 10.0 to 99.9 mbar | 1% of reading |
Accuracy 100 to 800 mbar | 0.5% of reading |
Accuracy 800 to 1,099 mbar | 0.25 % of reading |
Accuracy 1,100 to 1,333 mbar | 0.5% of reading |
Maximum measuring resolution | 1.0E-7 mbar |
Barometric measurement range | 300 to 1,200 mbar |
Barometric accuracy | +/- 0.5 mbar |
Atmospheric referenced pressure output range | -1333 to + 300 mbar |
Vacuum temperature sensor range | -20 to + 85°C |
Vacuum temperature sensor accuracy | +/- 1.5 °C |
Transducer temperature sensor range | -20 to + 85°C |
Transducer temperature sensor accuracy | +/- 1.5 °C |
Temperature compensation | +10 to +50 °C |
Output signal 1 | 1 VDC / decade (0.5VDC at 1.0E-6 mbar) |
Output signal 2 (MKS 901P, 910, 925 Emulation) | 1 VDC / decade (1.0VDC at 1.0E-5 Torr) |
Output signal 3 (MKS GP 275 Convectron®) | 0.375 to 5.659 VDC |
Output signal 4 (MKS 523) | 0.5 VDC / decade (MKS 523) |
Output signal 5 (Inficon PSG500, PSG502, PSG510, PSG512 ) | 1.9 - 10 VDC (Inficon PSG55x, Leybold TTR91) |
Output signal 6 (Leybold TTR91, TTR96, TTR101) | 1.5 - 8.5 VDC (Pfeiffer TPR260/27x/28x) |
Output signal 7 (MKS GP 275 Convectron®) | 1.9 - 9.1 VDC |
Output signal 8 (MKS GP 390 MicroIon) | 0.5 VDC / decade |
Output Signal 9 (MKS 971, 972, 974B) | 0.5 VDC / decade (MKS 971B, 972B, 974B) |
Output signal 10 (Inficon Gemini output 1) | 1 VDC / decade |
Output signal 11 (Inficon Gemini output 2) | 1.33 VDC / decade |
Output signal 12 (Inficon Gemini output 3) | 0.6 VDC / decade |
Output signal resolution | 16 bit (150 µV) |
Solid state relay contact rating (optional) | 50 V, 100 mArms / mADC |
Solid state relay contact endurance | Unlimited (no mechanical wear) |
Environment conditions | |
Operating ambient temperature | -40 to +50 °C (-40 to +122 °F) |
Media temperature | -20 to +50 °C (-58 to 122 °F) |
Storage ambient temperature | -40 to +125 °C (-40 to +257 °F) |
Maximum media pressure | 10 bar |
Mounting position | Arbitrary |
Protection rating, EN 60529/A2:2013 | IP40 |
Humidity, IEC 68-2-38 | 98%, non-condensing |
Power supply | |
Supply voltage | 12-30 VDC |
Power consumption | 350 mW (Max) |
Yes | |
Overvoltage protection | Yes |
Internal fuse | 100 mA (Thermal recoverable) |
Materials | |
Vacuum process flange | SS 1.4401 / AISI 316 stainless steel |
Enclosure | SS 1.4307 / AISI 304L stainless steel / Aluminum 6061 |
Vacuum exposed materials (media wetted) | 316 Stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO2, Si3N4, gold, Viton®, low out-gassing epoxy resin, solder, RO4305 |
Process leak tightness | <1·10-9 mbar·l/s |
Approvals | |
CE | EMC directive 2014/30/EU |
RoHS compliance | Directive EU 2015/863 |
Solid state setpoint control relay approvals | UL Recognized: File E76270 CSA Certified: Certificate 1175739 EN/IEC 60950-1 Certified |
Reliability | |
MTBF (Mean Time Between Failure) | 13.092.170 hours /1494 years |
Failure rate FIT (Failure In Time, where time=10E+9 hours) | 76,38 |
Convectron® is a registered trademark of MKS Instruments Inc.
Specifications are subject to change without further notice.
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