901P LOADLOCK CROSS-REFERENCE GUIDE

Sens4 offers a series of vacuum transducers that provides drop-in compatible with the MKS 901P vacuum transducer.

The suggested MKS 901P equivalent replacement product from Sens4 is intended for direct installation in existing 901P loadlock installations without need for change of cabling, analog pressure signal scaling, setpoint controls, digital communication protocol or digital interface.
We offer two plug and play alternatives to the MKS 901P loadlock vacuum transducer.

The VPM-7 SmartPirani™ ATM transducer offers comparable functionality as the 901P vacuum transducer but provides improved measurement performance with true absolute diaphragm measurement from 2 to1000 Torr in combination with the high-performance MEMS Pirani vacuum measurement capability down to 7.5E-7 Torr. The atmospheric switch function offers accurate measurement relative to ambient barometric pressure.

The VPM-17 TriCAP™ ATM transducer has in integrated capacitance diaphragm manometer and in combination with its piezo diaphragm sensor the VPM-17 offers gas independent measurement from 5E-3 to 1333 Torr. The SmartPirani™ wide range MEMS Pirani offers unique zero stability and measurement capability down to 7.5E-7 Torr. The VPM-17 is the choice for significant performance upgrade of existing 901P applications.

• Vacuum flange mechanical compatibility
• Emulates analog voltage output pressure signal scaling
• Emulates digital communication protocol with extended measuring range
• Comparable relay setpoint functionality
• Connector pin compatibility
• Supply voltage compatibility
• Compatibility with MKS PDR900 power supply and display
  

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