Solar Cell PVD & CVD Vacuum Processing

Physical Vapor Deposition (PVD) and Chemical Vapor Depositions (CVD) are critical processes in the solar cell industry where solid materials are vaporized under vacuum pressure conditions and deposited onto a target material. The PVD process is essential for creating light-absorbing semiconductors, which are crucial for converting sunlight into electricity. Additional reflective and anti-reflective coatings applied to solar cells using PVD enhance the durability and performance of solar panels.

PVD Vacuum Process

Vacuum technology is vital for creating the precise conditions needed for controlled vaporization of solid materials. Under vacuum, vaporized atoms or ions can travel freely from the source material to the target substrate. PVD coating systems may utilize either single vacuum chamber setups or cluster systems, which include an auxiliary load-lock vacuum system for transferring devices from atmospheric pressure to the processing chamber. The process typically begins with evacuation using a turbo pump, reaching a low base pressure below 1E-5 mbar to remove residual gases and establish a controlled environment. During coating, the process pressure is maintained by introducing a specified gas, creating a pressure between 1E-3 and 5E-2 mbar.

Vacuum Measurement and Controls

Accurate vacuum measurement and pressure control are vital in PVD to ensure the ideal conditions for consistent, high-quality thin film deposition. The vacuum pressure and gas composition directly impact the deposition rate, coating purity, and overall efficiency of the PVD process.

Traditionally, ionization gauges have been used to verify base pressures below 1E-4 mbar. However, advanced MEMS Pirani gauges now extend the measurable range by 1-2 decades compared to conventional Pirani and convection gauges.

For coating processes involving mixed gases, capacitance diaphragm gauges ensure accurate, gas-independent measurements. The VPM-15 TriCAP™ combines wide-range MEMS Pirani and capacitance diaphragm gauges in a single transducer.

In metal coating applications, where residual particles may be present, a protective baffle setup is essential to shield sensor elements from contamination.

Recommended Vacuum Gauges for Solar PVD Coating

Consult our experts today to learn more about our standard and customized vacuum measurement solutions, partnerships, and how we can help you achieve the vacuum measurement precision and control you need in your analytical instrumentation and applications.