VDM-2 Ceramic Diaphragm Transducer

VDM-2 Ceramic Diaphragm Transducer for vacuum measurement

0.1 to 1333 mbar Measuring Range

Gas Independent Measurement with Ceramic Diaphragm Sensor

Corrosion Resistance

Compatible with a wide selection of Acids and Solvents

Multiple Control Options

Analog and Digital interface. Setpoint Relays for Process Control

Drop-in Replacement

Pin and Output Compatible with other Vendors Steel Piezo Transducers

The VDM-2 Ceramic Diaphragm vacuum transducer delivers high-precision vacuum pressure measurement using a robust and corrosion-resistant aluminum oxide diaphragm that flexes proportionally to the applied pressure. At its core, the piezo resistive sensor element ensures accurate and stable measurement across a wide range of vacuum applications.

Unlike conventional stainless steel diaphragm piezo vacuum transducers that rely on oil-filled sensor elements, the VDM-2 features a clean, dry ceramic piezo diaphragm sensor, completely eliminating the risk of oil contamination in sensitive vacuum systems.

Designed for versatility, the VDM-2 measures gas pressure independently of gas type or composition, making it an ideal solution for applications in semiconductor processing, analytical instruments, industrial vacuum systems, and more.

Do you need a different VDM-2 Configuration?

We offer a large selection of different configuration, so if you didn't find the right configuration in our Buy Now Store please go to our VDM-2 RFQ / Order page.

Alternative to Capacitance Diaphragm Gauges

Capacitance diaphragm gauges are used in many vacuum applications for measurement and control of advanced processes. The VDM-2 transducer is a cost-effective and compact alternative to traditional 1000 Torr/mbar full-scale Capacitance Diaphragm Gauges (CDGs). 


VDM-2 Measurement range utilizing ceramic diaphragm

Engineered for Harsh Vacuum Environments

The VDM-2 vacuum transducer is specifically designed for use in demanding vacuum applications where corrosive gases, aggressive chemicals, or harsh process conditions are present. Its ceramic aluminum oxide diaphragm provides exceptional corrosion resistance to a wide range of solvents, acids, and reactive compounds, ensuring long-term reliability in challenging environments.

For even greater protection, the VDM-2 is available with an optional Parylene coating—a highly corrosion-resistant and hydrophobic polymer barrier. Parylene is widely used in medical applications, including hydrogen peroxide plasma sterilization and lyophilization, where durability and contamination resistance are critical.

In vacuum processes prone to particle contamination, an optional protective baffle prevents deposition of particulates on the sensor diaphragm, safeguarding measurement accuracy and sensor longevity.

Built for resilience, the aluminum oxide sensor element is engineered to withstand sudden venting and overpressure conditions up to 2 bar absolute (29 psia), making it ideal for high-stress vacuum systems in industrial, pharmaceutical, and semiconductor environments.


VDM-2 Transducer with Baffle for harsh environments
VDM-2 Ceramic Diaphragm Transducer with Protective Baffle

Flexible Analog Voltage Output for Pressure Readout and Control

The VDM-2 vacuum transducer features a high-resolution analog voltage output, enabling direct connection to external displays, data acquisition systems, PLCs, or process control equipment for real-time vacuum pressure monitoring.

Compatible with a wide range of systems, the VDM-2 offers multiple preconfigured analog output curves, allowing for seamless drop-in replacement of vacuum gauges from various manufacturers—minimizing setup time and integration effort.

For custom applications, the analog output can also be user-configured with arbitrary linear scaling, providing maximum flexibility to match specific system requirements or control strategies.



VDM-2 Analog Voltage Output

Digital Interface with RS-232 and RS-485 for Reliable Vacuum Data Transmission

The VDM-2 vacuum transducer features integrated RS-232 and RS-485 digital interfaces, ensuring reliable, noise-free transmission of vacuum measurement data over long cable distances—without signal degradation or interference from electrical noise.

This digital communication interface supports advanced functions such as real-time pressure monitoring, diagnostics, predictive maintenance, calibration, service status, setpoint configuration, and analog output scaling. These capabilities enable enhanced system control and simplify integration into modern vacuum systems.

Even when the analog output is configured for a limited range (e.g., 100 Torr full scale), the digital output continues to deliver accurate, full-range vacuum pressure readings up to 1333 mbar (1000 Torr), providing maximum flexibility for monitoring and control.



Connect digital to VDM-2 vacuum transducer

Reliable Solid-State Relays for Advanced Vacuum System Control

The VDM-2 vacuum transducer is equipped with three independent solid-state switch relays for direct control of external devices such as vacuum pumps, valves, and safety interlock circuits. These integrated outputs enable seamless automation and real-time system response in demanding vacuum control applications.

Compared to traditional electromechanical relays, solid-state relays deliver faster switching speeds, greater reliability, and arc-free operation, while eliminating electromagnetic interference (EMI) during switching—ideal for precision and noise-sensitive environments.

Built for durability, the VDM-2’s relays are UL-listed, CSA-recognized, and certified to EN/IEC 60950-1 standards, ensuring long-term performance and safety in critical vacuum processes and high-cycle industrial applications.

VDM-2 Setpoint Control
VDM-2 Ceramic Diaphragm Gauge enabling other vendor drop-in compatibility

Compatible with Other Vendor Gauges – Drop-In Replacement Vacuum Transducers

Sens4's drop-in replacement vacuum transducers are engineered for full compatibility with other vendor gauges, featuring connector pin-out compatibility that allows for seamless installation without the need for rewiring.

These high-performance transducers emulate the analog output scaling and measurement range of equivalent vacuum gauge models from leading manufacturers, ensuring accurate and consistent performance across systems.

In addition, Sens4 vacuum transducers support digital protocol emulation, enabling plug-and-play integration with existing vacuum controllers, power supplies, and display units—without requiring changes to the communication software. This makes them the ideal choice for vacuum system upgrades, replacements, and OEM integrations where interoperability is essential.

Customized Vacuum Transducer Settings – Tailored for Your Application

The VDM-2 vacuum transducer can be factory-configured to meet your specific application requirements, ensuring optimal performance and seamless integration right out of the box. Custom configuration options include:

  • Measurement range
  • Vacuum pressure units (e.g., mbar, Torr, Pa)
  • Setpoint configuration
  • Output signal scaling

These pre-configured transducers are ideal for OEMs and system integrators looking for plug-and-play installation with minimal setup time.

Each customized VDM-2 unit is assigned a unique part number, simplifying future reordering and ensuring consistency across your vacuum systems.

Applications & Markets 

The VDM-2 Ceramic Diaphragm Vacuum Transducer is engineered for high-accuracy vacuum measurement and control in demanding industrial and scientific environments. Designed for long-term stability and reliability, it supports a wide range of vacuum applications across multiple sectors.

Typical applications include:

  • Semiconductor manufacturing
  • Laboratory research and instrumentation
  • Industrial vacuum systems
  • Analytical and process equipment
  • Leak detection and quality control

To meet diverse performance and integration needs, a broad range of VDM-2 vacuum transducer configurations is also available, making it easy to find the right solution for your specific process requirements

Distillation vacuum applications

Distillation

Measure vacuum gas pressure when simulating the harsh environment of space.   

PVD vacuum measurement and control

PVD Coating

The VDM-2 with serviceable baffle protection enable use and longevity in Physical Vapor Deposition (PVD) coating applications. 

Furnace Vacuum Applications

Furnace

Measure and control vacuum during vacuum heat treatment. Optional baffle and coating protection available for industrial applications.

Vacuum fore line measurement

Vacuum Fore-line

Measurement and surveillance of vacuum fore-line for protection of turbo molecular vacuum pumps.

Semiconductor vacuum applications

Semiconductor

CVD, PVD, and foreline vacuum measurement in Semiconductor applications. Ceramic corrosion resistant diaphragm sensor.

CVD vacuum application for synthetic diamonds

CVD 

Synthetic diamonds can be created utilizing vacuum technology and the VDM-2 can be used to control the process.  

Specifications & Downloads

Specifications


Measuring range in mbar

0.1 to 1333 mbar (0.1 to 1000 Torr)

Measuring principle

Ceramic diaphragm piezo resistive

Accuracy 100 to 1333 mbar

0.5% of reading

Accuracy 1 to 99.9 mbar

0.05% of full scale (1333 mbar)

Hysteresis 0.1 to 10 mbar (ISO19685:2017)

1%

Hysteresis 10 to 1200 mbar (ISO19685:2017)

0.1%

Analog output resolution

16 bit (150 μV)

Analog output update rate

560 Hz

Response time (ISO 19685:2017)

<20 ms

Temperature compensation

+10 to +50 °C

Solid state relay set point range

1 to 1333 mbar (0.75 to 1000 Torr)

Solid state relay contact rating

50 V, 100 mArms / mADC

Solid state relay approvals

UL Recognized: File E76270

CSA Certified: Certificate 1175739

EN/IEC 60950-1 Certified

Environment conditions


Operating ambient temperature

-20 to +50 °C

Media temperature

-20 to +50 °C

Storage ambient temperature

-40 to +80 °C

Bake-out temperature (non-operating)

+80 °C

Maximum media pressure(3)

2 bar absolute (29 psia)

Burst pressure(4)

4 bar absolute (58 psia)

Mounting position

Arbitrary

Protection rating, EN 60529/A2:2013

IP40

Humidity, IEC 68-2-38

98%, non-condensing

Power supply


Supply voltage

12-30 VDC

Power consumption

240 mW (max)

Reverse polarity protection

Yes

Overvoltage protection

Yes

Internal fuse

100 mA (thermal recoverable)

Materials


Enclosure

SS 1.4307 / AISI 304L / Aluminum 6061

Vacuum Process flange (media wetted)

SS 1.4401 / AISI 316

Vacuum exposed materials (media wetted) Standard version

316 Stainless steel, Viton®, Aluminum oxide ceramic (AI2O3)

Vacuum exposed materials (media wetted) Parylene protected version

316 Stainless steel, Viton®, Parylene

Process leak tightness

<1·10-9 mbar·l/s

Approvals


CE

EMC directive 2014/30/EU

RoHS compliance

Directive EU 2015/863

​(1) Accuracy specifications are typical values at stable temperature after zero adjustment.

​(2) Viton® is a trademark of THE CHEMOURS COMPANY FC, LLC

​(3) Overpressure limits only applicable with using fittings rated to the specified

​(4) Burst pressure is the maximum pressure without rupture of sensor diaphragm

Specifications are subject to change without further notice

Datasheet

> VDM-2 Ceramic Diaphragm Datasheet 


User Manual

> VDM-2 Shortform manual

> VDM-2 Operation and Installation manual



Declaration of Conformity

> CE Declaration of Conformity 


ROHS

> RoHS statement


REACH


Reliability

> Reliability report

> VPM-5-1111111 STEP file

Do you need assistance to find the right vacuum measurement solution?

Reach out today to the Sens4 team for questions, product recommendations or quote. Learn more about how we can help!

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