Rethink Vacuum Gauging
The TriCAP™ ATM is a true novel multi-sensor vacuum gauge and is the choice for performance upgrade of traditional Pirani gauge applications or a cost optimized all-in-one solution for applications where separate capacitance manometers and Pirani gauges are used.
CDG Automatically Zero Adjustment
The integrated heat-loss MEMS Pirani sensor extends the measurement range down to 1E-6 mbar and introduces an innovative automatic zero adjustment for the capacitance manometer, eliminating the typical need for manual zeroing in traditional capacitance diaphragm gauges. No manual push-button zeroing is needed—simply pump down to the auto-zero point, and the Capacitance Diaphragm Gauge adjusts automatically and is ready for accurate measurements.
Enabling Use in Demanding Applications
For applications where sensors may be exposed to corrosive or aggressive gases, the TriCAP™ is available with a conformal protective coating that acts as an effective barrier.
The TriCAP™ transducer series also offers an optional ceramic or Parylene protective layer to prevent corrosion or oxidation of sensor materials. Ceramic is highly corrosion-resistant and is widely used for vacuum sensor diaphragms in capacitance diaphragm gauges. Parylene, a specialized polymer with excellent corrosion-resistant and hydrophobic qualities, is ideal for medical applications such as lyophilization and sterilization.
In some vacuum processes, particulates can threaten vacuum gauges. For these applications, TriCAP™ transducers are available with a protective baffle that guards against macroscopic particles. When combined with protective coating options, the TriCAP™ transducers are designed to withstand demanding vacuum environments.
Analog Output
A wide selection of analog output scaling options to emulate other vendors’ vacuum gauges and transducers is available.
An optional secondary analog output enables external monitoring of both the full-range vacuum pressure and the pressure signal relative to atmospheric pressure.
The analog output voltage provides a signal for external readout or controls. The VPM-17 offers as standard a voltage output signal of 1VDC/decade mbar, Torr, or Pascal.
Connect Digital
The RS-232 and RS-485 serial interfaces can be used to transfer pressure and temperature measurement data to external equipment.
The digital interface enables diagnostics, predictive maintenance, service, calibration, setpoint configuration, analog output scaling, and the acquisition of real-time vacuum pressure measurements for on-screen visualization.
Complementary datalogging software available for easy PC interfacing.
Reliable Setpoint Relay Control
The three independent solid-state switch relays can be used to control external equipment, such as pumps, valves, and safety interlock circuits.
Unlike electro-mechanical relays, solid-state relays provide greater reliability and faster switching speeds, with arc-free contacts and no EMI (electromagnetic interference) during switching.
TriCAP™ relays are engineered for durability and are UL-listed, CSA-recognized, and EN/IEC 60950-1 certified, ensuring high confidence in controlling critical vacuum processes and high-cycle applications.
Other Vendor Compatibility
The VPM-17 TriCAP™ ATM transducer is available with pin compatibility, analog voltage pressure signal emulation, and digital protocol emulation with vacuum transducers and transmitters from other vendors.
These emulation features enable quick, seamless performance upgrades of legacy micro-Pirani transducers, allowing a transition to next-generation vacuum transducers without changing cabling and system equipment software.
The VPM-15 TriCAP™ will provide enhanced measurement performance in many applications when replacing legacy vacuum gauges and transducers.
The other vendor emulation also provides compatibility with other vendors' controllers and display units.
Customized Settings
The VPM-17 transducer can be delivered with a custom configuration to match specific application requirements and work for a specific equipment installation out of the box. Examples of pre-configured options include measurement range, vacuum pressure unit, setpoint configuration, and output signal scaling.
Customized products will be assigned a unique part number for easy and straightforward future reordering.
Applications & Markets
The VPM-17 TriCAP™ is designed for reliable measurement and control of advanced vacuum processes and is suitable for a wide range of applications in industry and science. A wide selection of VPM-15 configurations is available to meet different requirements across various applications.
Hydrogen Supply
Measurement and surveillance of insulation vacuum in Hydrogen storage tanks and supply lines.
Semiconductor
CVD, PVD, and foreline vacuum measurement in Semiconductor applications. Ceramic corrosion resistant sensors available.
Mass Spectrometers
Take advantage of the low pressure measurement capability offered by the VPM-5 in mass spectrometer instrumentation.
PVD Coating
The VPM-17 with serviceable baffle protection enable use and longevity in Physical Vapor Deposition (PVD) coating applications.
Furnace
Measure and control vacuum during vacuum heat treatment. Optional baffle and coating protection available for industrial applications.
Space Simulation
Measure vacuum gas pressure when simulating the harsh environment of space.
