Alternative to Capacitance Diaphragm Gauges
Capacitance diaphragm gauges are used in many vacuum applications for measurement and control of advanced processes. The VDM-3 transducer is a cost-effective and compact alternative to traditional 1000 Torr/mbar full-scale Capacitance Diaphragm Gauges (CDGs).
For applications that requires a separate atmospheric switch the VDM-3 can consolidated vacuum measurement and atmospheric switching function in one device.
Designed for Harsh Environments
The VDM-3 enables use in demanding vacuum applications where corrosive gases and chemical compounds may be present. The Ceramic aluminum oxide diaphragm offers excellent corrosion resistant properties against many solvents and acids.
The VDM-3 transducer is also available with an optional Parylene protective barrier to guard against corrosion or oxidation of sensor materials. Parylene, a unique polymer with highly corrosion resistant and hydrophobic properties, is specifically designed for medical applications such as lyophilization and hydrogen peroxide plasma sterilization of medical devices.
In vacuum systems and processes where macroscopic particulates are present, the optional protective baffle acts as an efficient barrier against deposition of contaminants on the sensor diaphragm.
The aluminum oxide sensor element is designed to be robust, capable of withstanding instant ventilation and over-pressurization up to 2 bar absolute (29 psia).
Measure and Control Advanced Vacuum Processes
The VDM-3 transducer offers an excellent price/performance ratio and can be used for surveillance and
measurement of fore-line vacuum pressure in many industrial and scientific applications.
With both analog and digital output the VDM-3 providing flexibility and precision for diverse vacuum control applications.
Analog Voltage Output
The analog output provides a voltage signal for external pressure readout or controls.
The VDM-3 transducer is available with many different preconfigured analog output curves for seamless replacement of gauges from various vendors.
Furthermore, the output can be configured by the user for arbitrary linear scaling.
Connect Digital
The RS-232 and RS-485 serial interfaces facilitate the transfer of measurement data with no signal degradation over extended cable lengths or interference from electrical noise.
The digital interface enables diagnostics, predictive maintenance, service, calibration, setpoint configuration, analog output scaling and acquisition of real-time vacuum pressure measurements for on-screen visualization.
When the analog output is set to a reduced measuring range, such as 100 Torr full scale, the digital output independently provides full range measurements up to 1333 mbar (1000 Torr).
Robust Setpoint Relay Control
The three independent solid-state switch relays can be used for external control of pumps, valves, safety interlock circuits, and other external equipment.
Compared to electro-mechanical relays, solid-state relays offer superior reliability and faster switching times while providing arc-free contacts and generating no EMI (electromagnetic interference) when switching.
The VDM-3 relays are designed to last and are UL-listed, CSA-recognized, and EN/IEC 60950-1 certified for maximum confidence when used to control critical vacuum processes and high-cycle applications.
Other Vendor Compatibility
The drop-in replacement vacuum transducers are designed with connector pin-out compatibility, enabling seamless replacement of other vendor gauges without change of cabling.
Additionally, these transducers emulate the analog output scaling and range of equivalent products from other manufacturers.
Moreover, Sens4 transducers have the capability to emulate the digital serial communication protocol, facilitating easy installation without requiring adjustments to the communication software of the vacuum equipment. This digital protocol emulation ensures compatibility with power supply and controller display units from different vendors.
Customized Settings
The VDM-3 transducer can be delivered with a custom configuration to match specific application requirements and work for a specific equipment installation out of the box. Examples of pre-configured options include measurement range, vacuum pressure unit, setpoint configuration, and output signal scaling.
Customized products will be assigned a unique part number for easy and straightforward future reordering.
Applications & Markets
The VDM-3 transducer is designed for reliable measurement and control of advanced vacuum processes and is suitable for a wide range of applications in industry and science. A wide selection of VDM-3 transducer is available to meet different requirements across various applications.
PVD Coating
The VPM-5 with serviceable baffle protection enable use and longevity in Physical Vapor Deposition (PVD) coating applications.
Furnace
Measure and control vacuum during vacuum heat treatment. Optional baffle and coating protection available for industrial applications.
Space Simulation
Measure vacuum gas pressure when simulating the harsh environment of space.
Hydrogen Supply
Measurement and surveillance of insulation vacuum in Hydrogen storage tanks and supply lines.
Semiconductor
CVD, PVD, and foreline vacuum measurement in Semiconductor applications. Ceramic corrosion resistant sensors available.
Compressor Service
Take advantage of the low pressure measurement capability offered by the VPM-5 in mass spectrometer instrumentation.
