Leading Vacuum Measurement Technology
The VPi-5 iVacSens™ features the record-breaking MEMS heat-loss Pirani sensor in combination with Piezo diaphragm sensor, capable of measuring pressures from 1.0E-6 mbar to 1333 mbar (7.5E-6 to 1000 Torr).
The precision Piezo diaphragm sensor eliminates measurement errors in the range of 2 - 1333 mbar that are commonly experienced when using Pirani gauges, which can be affected by changes in gas type or composition.
All measurement values are accessible via UART or RS-485 digital interfaces, providing flexibility for integration into various systems.
Temperature parameters can be monitored to issue warnings or control signals, allowing equipment to shut down in case of overheating or to support predictive maintenance strategies.
Customized Solutions
The transducer module can be customized with specific setpoint switch values and other digital parameters to suit diverse application needs.
For OEM customers, Sens4 provides bespoke solutions, including tailored installation flanges, interfaces, digital protocols, and cabling, enabling seamless integration into specialized equipment designs.
Flexible Operation and Configuration
The iVacSens™ offers a variety of analog and digital operation modes, enabling seamless integration into customer equipment.
Analog Voltage Output
The standard analog voltage output delivers a signal of 150 mV/decade, which can be connected to an external analog-to-digital converter for straightforward data acquisition.
Universal Asynchronous Receiver/Transmitter (UART)
The UART interface connects directly to a host microcontroller, allowing digital acquisition of measurement data and configuration of the iVacSens™ transducer module.
RS-485 Interface
The RS-485 interface supports parallel connection of multiple iVacSens™ devices, with each transducer individually addressable. This standardized interface ensures easy communication with external systems and is compatible with the VPM-5 and VPM-7 SmartPirani™ transducer series.
Setpoint Control Outputs
Three independent setpoints provide digital signals at user-defined pressure thresholds. These setpoints enable the iVacSens™ to function as a pressure switch, controlling vacuum processes or ensuring adequate vacuum levels for devices like ion sources.
The setpoint function can also act as a safety interlock switch, enhancing operational safety in critical applications.
Getting Started
The iVacSens™ evaluation kit enables users to easily explore its features and evaluate its measurement performance prior to integration into their equipment.
The kit comes with USB connectivity and evaluation software, simplifying setup and data analysis.
For added convenience, the evaluation sensor module is pre-mounted on a DN16KF vacuum flange, allowing straightforward installation onto a vacuum system.
Applications & Markets
The VPi-5 iVacSens™ is engineered for accurate measurement and control in advanced vacuum processes, making it ideal for a broad spectrum of industrial and scientific applications. Additionally, the VPi-5 series offers a diverse range of configurations to cater to various application-specific needs.
PVD Coating
The VPM-5 with serviceable baffle protection enable use and longevity in Physical Vapor Deposition (PVD) coating applications.
Fore-line
The VPM-4 is suitable for measurement surveillance of fore-line vacuum. Setpoint relays can be programmed to provide control signals to external equipment.
Space Simulation
Measure vacuum gas pressure when simulating the harsh environment of space.
Hydrogen Supply
Measurement and surveillance of insulation vacuum in Hydrogen storage tanks and supply lines.
Semiconductor
CVD, PVD, and foreline vacuum measurement in Semiconductor applications. Ceramic corrosion resistant sensors available.
Mass Spectrometers
Take advantage of the low pressure measurement capability offered by the VPM-4 in mass spectrometer instrumentation.
