Vacuum instrumentation explained

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VACUUM INSTRUMENTATION EXPLAINED

A vacuum measurement instrument is a generic term for measuring equipment for measurement of the gas pressure quantity in a vacuum application. It can be a standalone vacuum pressure transducer with integrated sensor and electronics or it can be a display and power supply unit with a separate passive sensor connected.


There are many types vacuum instruments using different measuring principles and covering different pressure ranges. Common vacuum measuring instruments are:


  • Pirani heat-loss
  • Cold cathode ionization
  • Hot cathode ionization
  • Capacitance manometers
  • Piezo diaphragm
  • Spinning rotor gauge or viscosity gauge


Instrumentation for measurement and control of vacuum gas pressure is used in many industrial and scientific applications.


A vacuum instrument can provide a display read-out, digital value or an analog output signal.

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■  1E-6 to 1000 mbar range

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