VDM-7 DiCAP™ ATM Diaphragm Transducer

VDM-5

Dual Diaphragm Sensor 

5.0E-3 to 1333 mbar Measurement Range for Measurement Independent of Gas type

Corrosion Resistance

Optional Ceramic or Parylene sensor protection

Digital and Analog Interfacing 

Flexible System Integration with Digital Interface, Analog Out, and Setpoint Relays

Atmospheric Switching 

Measurement relative to Atmospheric Pressure enable Accurate Control of Venting Cycle.

The VDM-7 DiCAP™ ATM transducer dual-sensor design sets new standards and it stands out from other vacuum gauges by offering a cost-effective, gas-independent measurement range from 5.0E-3 to 1333 mbar. Furthermore it offers additional measurement relative to ambient pressure enabling accurate and precise control of vacuum system venting.


In vacuum applications where the gas composition or type may vary, traditional gas-dependent Pirani gauges often produce large measurement deviations from the actual pressure. The VDM-7 transducer uses a precision capacitance diaphragm gauge (CDG) sensor that eliminates gas dependency, delivering accurate measurements also when gas properties change.

VDM-7 RFQ and ordering 

We offer a large selection of different configuration, so if you didn't find the right configuration in our Buy Now Store please go to our VDM-7 RFQ / Order page.

Rethink Vacuum Gauging ​

The VDM-7 DiCAP™ ATM is an innovative multi-sensor vacuum gauge and is the ideal choice for upgrading the performance of traditional Pirani gauge applications or as a cost-optimized all-in-one solution for applications that use separate capacitance manometers and Pirani gauges.  


Enabling Use in Demanding Applications

For applications involving exposure to corrosive or aggressive gases, the DiCAP™ is available with a conformal protective coating that acts as an effective barrier.

The VDM-7 DiCAP™ transducer series offers optional protective layers made of ceramic or Parylene to safeguard sensor materials against corrosion or oxidation.

Ceramic provides exceptional corrosion resistance and is a trusted material for vacuum sensor diaphragms in capacitance diaphragm gauges.

Parylene, a unique polymer with superior corrosion-resistant and hydrophobic properties, is especially suitable for medical applications such as lyophilization and hydrogen peroxide sterilization.

For vacuum processes where particulates may pose a threat to gauges, DiCAP™ transducers are available with a protective baffle to block macroscopic particles. Combined with protective coating options, these transducers are designed to perform reliably in challenging vacuum environments.


VDM-7 Transducer with Protective Baffle

Analog Output

A wide selection of analog output scaling options to emulate other vendors’ vacuum gauges and transducers is available. An optional secondary analog output enables external monitoring of both the full-range vacuum pressure and the pressure signal relative to atmospheric pressure

The analog output voltage provides a signal for external readout or controls. The VDM-7 offers as standard a voltage output signal of 1VDC/decade mbar, Torr, or Pascal.  The analog output configuration can easily be changed by use the the digital interface.


 

VPM-5 Analog Output

Connect Digital

The RS-232 and RS-485 serial interfaces can be used to transfer pressure and temperature measurement data to external equipment.

The digital interface enables diagnostics, predictive maintenance, service, calibration, setpoint configuration, analog output scaling, and the acquisition of real-time vacuum pressure measurements for on-screen visualization. 

Reliable Setpoint Relay Control

The three independent solid-state switch relays can be used to control external equipment, such as pumps, valves, and safety interlock circuits.


Unlike electro-mechanical relays, solid-state relays provide greater reliability and faster switching speeds, with arc-free contacts and no EMI (electromagnetic interference) during switching.


The VDM-7 DiCAP™ ATM relays are engineered for longevity and are UL-listed, CSA-recognized, and EN/IEC 60950-1 certified, ensuring high confidence in controlling critical vacuum processes and high-cycle applications.

VPM-5 Setpoint Control

Other Vendor Compatibility 

The VDM-7 DiCAP™ ATM transducer is available with pin compatibility, analog voltage pressure signal emulation, and digital protocol emulation with vacuum transducers and transmitters from other vendors.

These emulation features enable quick, seamless performance upgrades of legacy micro-Pirani transducers, allowing a transition to next-generation vacuum transducers without changing cabling and system equipment software.

The VDM-7 DiCAP™ ATM will provide enhanced measurement performance in many applications when replacing legacy vacuum gauges and transducers.

The other vendor emulation also provides compatibility with other vendors' controllers and display units.

Applications & Markets

The VDM-7 DiCAP™ ATM is designed for reliable measurement and control of advanced vacuum processes and is suitable for a wide range of applications in industry and science. A wide selection of VDM-7 configurations is available to meet different requirements across various applications.

PVD

PVD Coating

The VDM-5 with serviceable baffle protection enable use and longevity in Physical Vapor Deposition (PVD) coating applications. 

Furnace Vacuum Applications

Furnace

Measure and control vacuum during vacuum heat treatment. Optional baffle and coating protection available for industrial applications.

Space Simulation

Space Simulation

Measure vacuum gas pressure when simulating the harsh environment of space.   

Vacuum Destillation

Destillation

Measurement and surveillance of insulation vacuum in Hydrogen storage tanks and supply lines.

Semiconductor

Semiconductor

CVD, PVD, and foreline vacuum measurement in Semiconductor applications. Ceramic corrosion resistant sensors available. 

Plasma Sterilization

Take advantage of the dual-sensor design with an all-in-one measurement solution for H2O2 Sterilization applications.

Specifications & Downloads

Specifications


Measuring range in mbar

5E-3 to 1333 mbar (3.75E-3 to 1000 Torr)

Measuring principle 5E-3 to 3.99 mbar

Capacitance Diaphragm Gauge (CDG)

Measuring principle 4 to 5.99 mbar

Blended CDG / Piezo Diaphragm

Measuring principle 6 to 1333 mbar

Piezo Diaphragm

Accuracy 5E-3 to 9.99E-3 mbar

5% of reading

Accuracy 1E-2 to 799 mbar

0.5% of reading

Accuracy 800 to 1099 mbar

0.25% of reading

Accuracy 1100 to 1333 mbar

0.5% reading

Hysteresis 1E-3 to 10 mbar (ISO19685:2017)

1%

Hysteresis 10 to 1333 mbar (ISO19685:2017)

0.1%

Analog output resolution

16 bit (150 μV)

Analog output update rate

124 Hz

Response time (ISO 19685:2017)

<20 ms

Temperature compensation

+10 to +50 °C

Solid state relay set point range

5E-6 to 1333 mbar (3.75E-6 to 1000 Torr)

Solid state relay contact rating

50 V, 100 mArms / mADC

Solid state relay approvals

UL Recognized: File E76270

CSA Certified: Certificate 1175739

EN/IEC 60950-1 Certified

Environment conditions


Operating ambient temperature

-20 to +50 °C

Media temperature

-20 to +50 °C

Storage ambient temperature

-20 to +80 °C

Bake-out temperature (non-operating)

+80 °C

Maximum media pressure(3)

4 bar absolute

Mounting position 

Arbitrary (4)

Protection rating, EN 60529/A2:2013

IP40

Humidity, IEC 68-2-38

98%, non-condensing

Power supply


Supply voltage

12-30 VDC

Power consumption

350 mW (max)

Reverse polarity protection

Yes

Overvoltage protection

Yes

Internal fuse

100 mA (thermal recoverable)

Materials


Enclosure

SS 1.4307 / AISI 304L / Aluminum 6061

Vacuum Process flange (media wetted)

SS 1.4401 / AISI 316

Vacuum exposed materials (media wetted) Standard version

316 Stainless steel, Kovar, glass, silicon, , AI2O3, gold, Viton®, low out-gassing epoxy resin, solder, RO4305, vitreous silica

Vacuum exposed materials (media wetted) Parylene protected version

316 Stainless steel, Viton®, Parylene

Vacuum exposed materials (media wetted) Ceramic protected version

316 Stainless steel, Viton®, Aluminum oxide ceramic (AI2O3)

Process leak tightness

<1·10-9 mbar·l/s

Approvals


CE

EMC directive 2014/30/EU

RoHS compliance

Directive EU 2015/863

​(1) Accuracy specifications are typical values at stable temperature after zero adjustment.

​(2) Viton® is a trademark of THE CHEMOURS COMPANY FC, LLC

​(3) Overpressure limits only applicable with using fittings rated to the specified

(4) After change of orientation zero adjustment may be required


Specifications are subject to change without further notice

Datasheet

> VDM-7 Datasheet

User Manual

> VDM-7 Shortform manual

> VDM-7 Operation and Installation manual



Declaration of Conformity

> CE Declaration of Conformity 


ROHS

> RoHS statement


REACH


Reliability

> Reliability report

CAD files

Do you need assistance to find the right vacuum measurement solution?

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