VPM-4 SmartPirani™ Lite Transducer

VPM-4

MEMS Pirani Sensor

Wide Range MEMS Pirani sensor for measurement from 1.0E-6 to 10 mbar

Corrosion Resistance

Optional Ceramic or Parylene sensor protection

Digital Interface

RS-232 and RS-485 Digital Interface for System Integration

Process Control

Programmable Setpoint Relays for Vacuum Switch functionality

The VPM-4 SmartPirani™ Lite vacuum transducer is based on cutting edge technology that offers best-in-class performance and has established new performance standards by extending the usable vacuum measuring range for thermal conductivity vacuum gauges by 1-3 decades.

The SmartPirani™ leverages advanced MEMS (Microelectromechanical Systems) sensor technology, integrated with a state-of-the-art digital signal processing architecture and innovative measurement algorithms. Coupled with precise automated manufacturing and calibration, these elements create a truly unique product that delivers unmatched measurement performance. The SmartPirani Lite is designed for vacuum switch functionality and has an upper measurement limit of 10 mbar. For full-range measurement up to atmospheric pressure and beyond, the VPM-5 SmartPirani transducer is the choice.


VPM-4 Configurator for RFQ?

We offer a large selection of different configuration, so if you didn't find the right configuration in our Buy Now Store please go to our VPM-4 RFQ / Order page.

Leading Vacuum Measurement Technology ​

The VPM-4 SmartPirani™ Lite transducer delivers exceptional performance, setting new benchmarks in vacuum measurement by expanding the usable measurement range of thermal conductivity vacuum gauges down to the 1E-6 decade.


VPM-4 range

The SmartPirani™ Lite extended measuring range enables its use in areas traditionally dominated by hot cathode ionization gauges or cold cathode ionization gauges. The SmartPirani™ Lite is optimized for low-range measurement performance and has an upper measurement range of up to 10 mbar (7,5 Torr).

The SmartPirani™ transducer series also includes the full-range VPM-5 SmartPirani™, which offers gas-independent measurement from 2 to 1333 mbar, and the VPM-7 SmartPirani™ ATM, which additionally provides an atmospheric switch function.

 

Enabling Use in Demanding Applications

For applications involving exposure to corrosive or aggressive gases, the SmartPirani™ is available with a conformal protective coating that serves as an effective shield.

The SmartPirani™ transducer series now offers optional protective barriers made of ceramic or Parylene to guard against corrosion and oxidation of sensor materials. Ceramic is a highly corrosion-resistant material, widely used in vacuum sensor diaphragms for capacitance diaphragm gauges. Parylene, a unique polymer, provides exceptional corrosion resistance and hydrophobic properties, making it ideal for medical applications such as lyophilization and sterilization.

In vacuum processes where particulates may damage gauges, the SmartPirani™ transducers are available with a protective baffle to block macroscopic particles. Combined with the protective coating options, these new SmartPirani™ transducers are specifically designed to perform reliably in challenging vacuum environments.


VPM-5 Transducer with Baffle
VPM-4 Transducer with Protective Baffle

Measure and Control Advanced Vacuum Processes

The VPM-5 SmartPirani™ is engineered for best-in-class measurement and control of vacuum gas pressure. Several output options provide more than just a pressure measurement signal.

Analog Output

The analog output voltage provides a signal for external readout or controls. The VPM-4 offers as standard a voltage output signal of 1VDC/decade mbar, Torr, or Pascal. 


Furthermore, it can also be user configured or ordered preconfigured with a large selection of other analog output options that enables drop-in replacement of gauges from other vendors.


Connect digital to VPM-5 transducer

Connect Digital

The RS-232 and RS-485 serial interfaces can be used to transfer pressure and temperature measurement data to external equipment.

The digital interface enables diagnostics, predictive maintenance, service, calibration, setpoint configuration, analog output scaling, and the acquisition of real-time vacuum pressure measurements for on-screen visualization. 

Reliable Setpoint Relay Control

The three independent solid-state switch relays can be used for external control of pumps, valves, safety interlock circuits, and other external equipment. 

Compared to electro-mechanical relays, solid-state relays offer superior reliability and faster switching times while providing arc-free contacts and generating no EMI (electromagnetic interference) when switching.

The SmartPirani™ relays are designed to last and are UL-listed, CSA-recognized, and EN/IEC 60950-1 certified for maximum confidence when used to control critical vacuum processes and high-cycle applications.

VPM-5 Setpoint Control
VPM-5 SmartPirani with RJ45

Other Vendor Compatibility 

The VPM-4 SmartPirani™ transducer offers pin compatibility, analog voltage pressure signal emulation, and digital protocol emulation for seamless integration with vacuum transducers and transmitters from other manufacturers.


These emulation capabilities facilitate the effortless upgrade of traditional wire Pirani transducers, convection gauges, and legacy micro-Pirani transducers, enabling users to transition to next-generation vacuum technology without modifying cabling or system software.


By replacing legacy vacuum gauges and transducers, the VPM-4 SmartPirani™ delivers both cost savings and improved measurement performance across various applications.


Additionally, the emulation features ensure compatibility with controllers and display units from other vendors.

Connect Digital Through Supply Voltage Line

Traditionally, other vendors' transducers equipped with FCC68/RJ45/8P8C and Hirschmann connectors do not offer digital communication. The novel S4-Connect interface enables access to the digital core of the VPM-4 transducer through digital communication over the power supply line.

The S4-Connect USB communicator enables easy configuration of transducer settings, diagnostics, and adjustment of calibration.

VPM-5 S4-Connect

Customized Settings

The VPM-4 transducer can be supplied with a custom configuration tailored to specific application needs, ensuring seamless integration and immediate functionality upon installation. Pre-configured options include measurement range, vacuum pressure units, setpoint settings, and output signal scaling.

Each customized product is assigned a unique part number, simplifying future reordering and ensuring consistency.

Applications & Markets

The VPM-4 SmartPirani™ is engineered for accurate measurement and control in advanced vacuum processes, making it ideal for a broad spectrum of industrial and scientific applications. Additionally, the VPM-4 series offers a diverse range of configurations to cater to various application-specific needs.

PVD

PVD Coating

The VPM-5 with serviceable baffle protection enable use and longevity in Physical Vapor Deposition (PVD) coating applications. 

Fore-line 

The VPM-4 is suitable for measurement surveillance of fore-line vacuum. Setpoint relays can be programmed to provide control signals to external equipment. 

Space Simulation

Space Simulation

Measure vacuum gas pressure when simulating the harsh environment of space.  

H2 Vacuum

Hydrogen Supply

Measurement and surveillance of insulation vacuum in Hydrogen storage tanks and supply lines.

Semiconductor

Semiconductor

CVD, PVD, and foreline vacuum measurement in Semiconductor applications. Ceramic corrosion resistant sensors available. 

Mass Spectrometers

Mass Spectrometers

Take advantage of the low pressure measurement capability offered by the VPM-4 in mass spectrometer instrumentation.

Specifications & Downloads

Specifications


Measuring range in mbar

1×10-6 to 10 mbar (7.5×10-7 to 7.5 Torr)

Measuring principle 1×10-6 to 10 mbar 

MEMS Pirani thermal conductivity

Accuracy 1×10-5 to 9.99×10-5

25% of reading

Accuracy 1×10-4 to 9.99×10-1 mbar

5% of reading

Accuracy 1.00 to 10 mbar

30% of reading

Hysteresis 1×10-3 to 10 mbar (ISO19685:2017

1%

Analog output resolution

16 bit (150 μV)

Analog output update rate

124 Hz

Response time (ISO 19685:2017)

<20 ms

Temperature compensation

+10 to +50 °C

Solid state relay set point range

5×10-6 to 1333 mbar (3.75×10-6 to 1000 Torr)

Solid state relay contact rating

50 V, 100 mArms / mADC

Solid state relay approvals

UL Recognized: File E76270

CSA Certified: Certificate 1175739

EN/IEC 60950-1 Certified

Environment conditions


Operating ambient temperature

-20 to +50 °C

Media temperature

-20 to +50 °C

Storage ambient temperature

-40 to +120 °C

Bake-out temperature (non-operating)

+120 °C

Maximum media pressure(3)

10 bar absolute

Mounting position

Arbitrary

Protection rating, EN 60529/A2:2013

IP40

Humidity, IEC 68-2-38

98%, non-condensing

Power supply


Supply voltage

12-30 VDC

Power consumption

240 mW (max)

Reverse polarity protection

Yes

Overvoltage protection

Yes

Internal fuse

100 mA (thermal recoverable)

Materials


Enclosure

SS 1.4307 / AISI 304L / Aluminum 6061

Vacuum Process flange (media wetted)

SS 1.4401 / AISI 316

Vacuum exposed materials (media wetted) Standard version

316 Stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO2, Si3N4, gold, Viton®, low out-gassing epoxy resin,

Vacuum exposed materials (media wetted) Parylene protected version

316 Stainless steel, Viton®, Parylene

Vacuum exposed materials (media wetted) Ceramic protected version

316 Stainless steel, Viton®, Aluminum oxide ceramic (AI2O3)

Process leak tightness

<1·10-9 mbar·l/s

Reliability


MTBF (Mean Time Between Failure)

13.092.170 hours

Failure rate FIT (Failure In Time, where time=10E+9 hours)

76,38

Approvals


CE

EMC directive 2014/30/EU

RoHS compliance

Directive EU 2015/863

​(1) Accuracy specifications are typical values at stable temperature after zero adjustment.

​(2) Viton® is a trademark of THE CHEMOURS COMPANY FC, LLC

​(3) Overpressure limits only applicable with using fittings rated to the specified

Specifications are subject to change without further notice

Datasheet

 VPM-5 Datasheet

User Manual

> VPM-5 Shortform manual

> VPM-5 Operation and Installation manual


3D Step files

> VPM-5-1X


Declaration of Conformity

> CE Declaration of Conformity 


ROHS

> RoHS statement


REACH


Reliability

> Reliability report

STEP files
> VPM-5-10xxxxx2 (DN16KF with 15 pin HD D-Sub)

> VPM-5-10xxxxx2 (DN25KF with 15 pin HD D-Sub)

> VPM-5-80xxxxx2 (DN16KF extended with 15 pin HD D-Sub)


Do you need assistance to find the right vacuum measurement solution?

Reach out today to the Sens4 team for questions, product recommendations or quote. Learn more about how we can help!

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All the features and functions of the VPM-5, but now also with capacitance and piezo diaphragm gauge for gas independent measurement from 5E-3 to 1333 mbar.

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VPM-7 SmartPirani ATM

The VPM-7 is the choice if you need to combine vacuum measurement and atmospheric switch functionality.

Go to VPM-7 Product page

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