Designed, engineered, and made in Denmark
The VPM-17 TriCAP™ ATM transducer establishes new standards with an all-in-one measurement solution for a wide selection of vacuum applications. It differentiates from any other vacuum gauges by offering an overall cost-effective gas independent measurement from 5.0E-3 to 1333 mbar in combination with Pirani heat-loss measurement down to 1E-6 mbar.
In vacuum applications where the gas composition or type can change, traditional gas dependent Pirani gauges will result in measurement deviation from the actual pressure. The TriCAP™ ATM transducer uses a precision capacitance diaphragm gauge (CDG) sensor that eliminates the gas dependency and provides accurate measurements also when the gas properties change.
The integrated heat-loss MEMS Pirani sensor extends the measuring range down to 1E-6 mbar and provides a novel automatic zero adjustment of the capacitance manometer that eliminates the common needs for manual zero adjustment of traditional capacitance diaphragm gauges.
The TriCAP™ ATM is a true novel multi-sensor vacuum gauge and is the choice for performance upgrade of traditional Pirani gauge applications or a cost optimized all-in-one solution for applications where separate capacitance manometers and Pirani gauges are used.
Particulate contamination can occur in applications like vacuum furnaces and physical vapor deposition systems. The optional baffle accessory can prevent such particles from reaching the sensor element and thereby extend the time between maintenance and overall lifetime of the product.
The baffle can be removed for contamination inspection, cleaning, or replacement.
The transducer settings and parameters can be user-programmed to control vacuum system and application process parameters.
The digital RS-232 or RS-485 serial interface can be used for diagnostics, predictive maintenance, service, calibration, setpoint configuration, analog output scaling and acquisition of real-time vacuum pressure measurements for on-screen visualization.
The serial USB programmer in combination with the free, intuitive configuration software is a plug-and-play solution for transducer programming, real-time.
Several vacuum pressure parameters need to be accurately and reliably controlled in many vacuum applications. The TriCAP™ ATM transducer has three independent solid-state switch relays that can be configured to control venting, the transfer chamber gate-valve, and the load-lock door.
Compared to traditional electro-mechanical relays, the solid-state relays offer superior reliability and faster switching time while providing arc free contacts and generates no EMI (electromagnetic interference) when switching contacts. The TriCAP™ ATM control relays are designed to last and are UL listed, CSA recognized, and EN/IEC 60950-1 certified for maximum confidence when used to control critical vacuum processes and high-cycle applications.
A wide selection of analog output scaling options to emulate other vendors’ vacuum gauges and transducers is available. An optional secondary analog output enables external monitoring of both the full-range vacuum pressure and the pressure signal relative to atmospheric pressure.
The transducer can be delivered with a custom configuration to match specific application requirements. Examples of pre-configured options include measurement range, vacuum pressure unit, setpoint configuration and output signal scaling. Customized products will be assigned a unique part number for easy and simple future reordering.
Rethink vacuum gauging
MicroPirani™ is a trademark of MKS Instruments, Inc
A capacitance diaphragm gauge, commonly referred to as a CDG, measures vacuum gas pressure by direct measurement of the applied force on the surface of a thin diaphragm.
A traditional capacitance vacuum transducer measures absolute.........
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