VPM-17 TriCAP™ ATM WIDE RANGE MULTI-SENSOR VACUUM TRANSDUCER WITH ATMOSPHERIC SWITCH
1×10-6 to 1333 mbar / 7.5×10-7 to 1000 Torr / 1×10-4 to 1.333×105 Pa
CAPACITANCE DIAPHRAGM, MEMS PIRANI, PIEZO TRANSDUCER
- Measurement range of 1×10-6 to 1333 mbar (7.5×10-7 to 1000 Torr)
- Gas-independent sensor from 5×10-3 to 1333 mbar
- Ultra-wide range high performance MEMS Pirani sensor
- Robust ceramic capacitance diaphragm gauge
- Ambient pressure referenced output signal
- Atmospheric switching functionality
- Mountable in any orientation without impact on performance.
- Programmable voltage output signal with other vendor emulation
- Digital RS-232 or RS-485 interface
- Three solid-state set points for vacuum process controlling
- Drop-in replacement for MKS 901P Loadlock transducer
- Compact multi-sensor solutions
Designed, engineered, and made in Denmark
The VPM-17 TriCAP™ ATM transducer establishes new standards with an all-in-one measurement solution for a wide selection of vacuum applications. It differentiates from any other vacuum gauges by offering an overall cost-effective gas independent measurement from 5.0E-3 to 1333 mbar in combination with Pirani heat-loss measurement down to 1E-6 mbar.
In vacuum applications where the gas composition or type can change, traditional gas dependent Pirani gauges will result in measurement deviation from the actual pressure. However, the TriCAP™ ATM transducer utilizes a precision capacitance diaphragm gauge (CDG) sensor, ensuring measurement accuracy even amid fluctuating gas properties, as it's not reliant on gas composition.
The integrated heat-loss MEMS Pirani sensor extends the measuring range down to 1E-6 mbar and provides a novel automatic zero adjustment of the capacitance manometer that eliminates the common needs for manual zero adjustment of traditional capacitance diaphragm gauges.
Rethink vacuum gauging
The TriCAP™ ATM is a true novel multi-sensor vacuum gauge and is the choice for performance upgrade of traditional Pirani gauge applications or a cost optimized all-in-one solution for applications where separate capacitance manometers and Pirani gauges are used.
Contamination containment
Particulate contamination can occur in applications like vacuum furnaces and physical vapor deposition systems. The optional baffle accessory can prevent such particles from reaching the sensor element and thereby extend the time between maintenance and overall lifetime of the product.
The baffle can be removed for contamination inspection, cleaning, or replacement.
Programmable transducer settings and parameters
The transducer settings and parameters can be user-programmed to control vacuum system and application process parameters.
The digital RS-232 or RS-485 serial interface can be used for diagnostics, predictive maintenance, service, calibration, setpoint configuration, analog output scaling and acquisition of real-time vacuum pressure measurements for on-screen visualization.
The serial USB programmer in combination with the free, intuitive configuration software is a plug-and-play solution for transducer programming, real-time.
Controlling vacuum pressure with reliable and robust setpoint relay control
Several vacuum pressure parameters need to be accurately and reliably controlled in many vacuum applications. The TriCAP™ ATM transducer has three independent solid-state switch relays that can be configured to control venting, the transfer chamber gate-valve, and the load-lock door.
Compared to traditional electro-mechanical relays, the solid-state relays offer superior reliability and faster switching time while providing arc free contacts and generates no EMI (electromagnetic interference) when switching contacts. The TriCAP™ ATM control relays are designed to last and are UL listed, CSA recognized, and EN/IEC 60950-1 certified for maximum confidence when used to control critical vacuum processes and high-cycle applications.
Analog voltage output for external readout
A wide selection of analog output scaling options to emulate other vendors’ vacuum gauges and transducers is available. An optional secondary analog output enables external monitoring of both the full-range vacuum pressure and the pressure signal relative to atmospheric pressure.
Customized settings
The transducer can be delivered with a custom configuration to match specific application requirements. Examples of pre-configured options include measurement range, vacuum pressure unit, setpoint configuration and output signal scaling. Customized products will be assigned a unique part number for easy and simple future reordering.
APPLICATIONS FOR TriCAP™ ATM VACUUM TRANSDUCERS
- Mass spectrometers
- Scanning electron microscopes
- Furnace heat treatment
- PVD coating of glass, optics, tools, packaging, decorative
- Refrigeration manufacturing and service
- Semiconductor processing equipment
- Vacuum pump service
Rethink vacuum gauging |
MORE INFORMATION
MANUALS
MicroPirani™ is a trademark of MKS Instruments, Inc
SENS4 FEATURED KNOWLEDGE CONTENT
CAPACITANCE DIAPHRAGM GAUGE EXPLAINED
A capacitance diaphragm gauge, commonly referred to as a CDG, measures vacuum gas pressure by direct measurement of the applied force on the surface of a thin diaphragm.
A traditional capacitance vacuum transducer measures absolute.........
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