Designed, engineered and made in Denmark
The VPM-4 SmartPirani™ LT transducer is based on the heat-loss sensor technology used in the record-breaking VPM-5 SmartPirani™ transducer and offers a measurement range from 13 to 1E-6 mbar (10 to 7.5E-7 torr).
The transducer technology has established new standards by extending the useable measuring range for thermal conductivity vacuum gauges by 1-3 decades.
The SmartPirani™ is based on cutting edge MEMS (Microelectromechanical Systems) sensor technology, combined with a novel precision digital signal processing architecture and advanced innovative measurement algorithms only available from Sens4.
The SmartPirani™ LT extended measuring range enable use in a range that traditional are dominated by hot cathode ionization gauges or cold cathode ionization gauges. The SmartPirani LT is optimized for low range measurement performance has an upper measurement range up 13 mbar (10 Torr).
The SmartPirani™ transducer series includes also the full range VPM-5 SmartPirani™ that offers gas independent measurement from 2 to 1333 mbar and VPM-7 SmartPirani™ ATM that furthermore offers atmospheric switch function.
Transducer settings and parameters are user-programmable from a PC or smartphone via digital communication interface. Transducers with an RS-232 or RS-485 serial interface can either be configured via the serial interface or the S4-Connect™ interface. The digital interface enables diagnostics, predictive maintenance, service, calibration, setpoint configuration, analog output scaling and acquisition of real-time vacuum pressure measurements for on-screen visualization. The S4-Connect™ USB programmer in combination with the free, intuitive configuration software is a plug-and-play solution for transducer programming, real-time measurements and diagnostics.
The SmartPirani™ transducer family is available with a user-cleanable integrated particulate baffle system specially designed for PVD applications. The baffle system is designed for blocking particulates while ensuring sufficiently high vacuum gas conductance and preventing clogging by particulates. The innovative baffle feature can increase time between service intervals and increase equipment up-time. Furthermore, in certain PVD applications the extended range of the SmartPirani™ eliminates the need for cold cathode vacuum gauges for base pressure verification.
The SmartPirani™ LT vacuum transducer is available with three independent solid-state switch relays can be used for external control of pumps, valves, safety interlock circuits and other external equipment. The basic control uses on/off regulation with a programmable setpoint and hysteresis value. Each solid-state relay offers both normally closed and normally open contacts.
Compared to electromechanical relays, the solid-state relays offer superior reliability and faster switching time while providing arc-free contacts and generating no EMI (electromagnetic interference) when switching contacts.
The SmartPirani™ relays are designed to last and are UL listed, CSA recognized, and EN/IEC 60950-1 certified for maximum confidence when used to control critical vacuum processes and high-cycle applications.
For applications where atmospheric switching functionality is required, like load-lock vacuum systems, the VPM-7 SmartPirani™ ATM offers the same performance, features and functions as the VPM-5, but with an additional precision atmospheric switch capability.
Although the SmartPirani™ vacuum transducer holds advanced functionality and smart digital technology the transducer can be operated as a standalone analog device with supply of voltage and return of measurement signal.
The analog voltage output can be configured via the S4-Connect™ or RS-232/RS-485 interface to any arbitrary scaling in the range 0-10 VDC. The analog output scaling feature enables amplified signal in a limited pressure range.
Furthermore, a wide selection of analog output scaling options to emulate vacuum gauges and transducers from other vendors is available.
The SmartPirani™ vacuum transducer can be delivered with a custom configuration to match specific application requirements. Examples of pre-configured options include measurement range, vacuum pressure unit, setpoint configuration and output signal scaling. Customized products will be assigned a unique part number for easy and simple future re-ordering.
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