VPM-4 SmartPirani transducer

VPM-4 SMARTPIRANI™ LT VACUUM TRANSDUCER

1×10-6 to 13 mbar / 7.5×10-7 to 10 Torr / 1×10-4 to 1.333×10+3  Pa

NEXT GENERATION MEMS PIRANI TRANSDUCER

 

  • Measurement range of 1×10-6 to 13.33 mbar (7.5×10-7 to 10 Torr)
  • Ultra-wide range high performance MEMS Pirani sensor
  • Advanced innovative digital signal processing  
  • Mountable in any orientation without impact on performance.
  • Programmable voltage output signal with other vendor emulation
  • Digital RS-232 or RS-485 interface
  • Low pressure vacuum switch 
  • Three solid-state set points for vacuum process controlling
  • High overpressure tolerance of 10 bar (145 psi)
  • Robust, compact stainless steel flange and enclosure design

Designed, engineered and made in Denmark

SmartPirani vacuum transducer
Download pdf datasheet

The VPM-4 SmartPirani™ LT transducer is based on the heat-loss sensor technology used in the record-breaking VPM-5 SmartPirani™ transducer and offers a measurement range from 13 to 1E-6 mbar (10 to 7.5E-7 torr).


The transducer technology has established new standards by extending the useable measuring range for thermal conductivity vacuum gauges by 1-3 decades.

The SmartPirani™ is based on cutting edge MEMS (Microelectromechanical Systems) sensor technology, combined with a novel precision digital signal processing architecture and advanced innovative measurement algorithms only available from Sens4.

VPM-4 SmartPirani measurement range

The SmartPirani™ LT extended measuring range enable use in a range that traditional are dominated by hot cathode ionization gauges or cold cathode ionization gauges. The SmartPirani LT is optimized for low range measurement performance has an upper measurement range up 13 mbar (10 Torr).  

The SmartPirani™ transducer series includes also the full range VPM-5 SmartPirani™ that offers gas independent measurement from 2 to 1333 mbar and VPM-7 SmartPirani™ ATM that furthermore offers atmospheric switch function.

Programmable transducer settings and parameters

Transducer settings and parameters are user-programmable from a PC or smartphone via  digital communication interface. Transducers with an RS-232 or RS-485 serial interface can either be configured via the serial interface or the S4-Connect™ interface. The digital interface enables diagnostics, predictive maintenance, service, calibration, setpoint configuration, analog output scaling and acquisition of real-time vacuum pressure measurements for on-screen visualization. The S4-Connect™ USB programmer in combination with the free, intuitive configuration software is a plug-and-play solution for transducer programming, real-time measurements and diagnostics.

SmartPirani transducer with protective baffle

Baffle option to prevent contamination 

The SmartPirani™ transducer family is available with a user-cleanable integrated particulate baffle system specially designed for PVD applications. The baffle system is designed for blocking particulates while ensuring sufficiently high vacuum gas conductance and preventing clogging by particulates. The innovative baffle feature can increase time between service intervals and increase equipment up-time. Furthermore, in certain PVD applications the extended range of the SmartPirani™ eliminates the need for cold cathode vacuum gauges for base pressure verification.

Controlling vacuum pressure with reliable and robust setpoint relay control

The SmartPirani™ LT vacuum transducer is available with three independent solid-state switch relays can be used for external control of pumps, valves, safety interlock circuits and other external equipment. The basic control uses on/off regulation with a programmable setpoint and hysteresis value. Each solid-state relay offers both normally closed and normally open contacts.

Compared to electromechanical relays, the solid-state relays offer superior reliability and faster switching time while providing arc-free contacts and generating no EMI (electromagnetic interference) when switching contacts. 

The SmartPirani™ relays are designed to last and are UL listed, CSA recognized, and EN/IEC 60950-1 certified for maximum confidence when used to control critical vacuum processes and high-cycle applications.


For applications where atmospheric switching functionality is required, like load-lock vacuum systems, the VPM-7 SmartPirani™ ATM offers the same performance, features and functions as the VPM-5, but with an additional precision atmospheric switch capability.


Analog voltage output for external readout

Although the SmartPirani™ vacuum transducer holds advanced functionality and smart digital technology the transducer can be operated as a standalone analog device with supply of voltage and return of measurement signal. 

The analog voltage output can be configured via the S4-Connect™ or RS-232/RS-485 interface to any arbitrary scaling in the range 0-10 VDC. The analog output scaling feature enables amplified signal in a limited pressure range.

Furthermore, a wide selection of analog output scaling options to emulate vacuum gauges and transducers from other vendors is available.


Customized settings

The SmartPirani™ vacuum transducer can be delivered with a custom configuration to match specific application requirements. Examples of pre-configured options include measurement range, vacuum pressure unit, setpoint configuration and output signal scaling. Customized products will be assigned a unique part number for easy and simple future re-ordering.

APPLICATIONS FOR SMARTPIRANI™ VACUUM TRANSDUCERS

  • Mass spectrometers
  • Scanning electron microscopes
  • Furnace heat treatment
  • PVD coating of glass, optics, tools, packaging, decorative
  • Refrigeration manufacturing and service
  • Semiconductor processing equipment
  • Vacuum pump service

Rethink vacuum gauging

SENS4 FEATURED KNOWLEDGE CONTENT

MEMS PIRANI GAUGE EXPLAINED

A MEMS Pirani vacuum sensor, gauge or transducer is a device for measuring vacuum gas pressure by measurement of the pressure dependent heat-loss from a heated resistive element deposited on a suspended micro-machined diaphragm. The MEMS Pirani vacuum transducer can measure........


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MORE INFORMATION

MicroPirani is a trademark of MKS Instruments, Inc

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